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The enablingMNT review on Front-End Manufacturing Equipment Suppliers for MST/MEMS provides an in-depth analysis of the state-of-the-art in MST/MEMS equipment such as wafer bonders, backside aligners etc. The report provides outline descriptions for the basic underlying techniques and technologies backed up by detailed information on the suppliers from across the world.
Using information from an extensive database of equipment suppliers and companies supplying Front End-specific equipment for the MST/MEMS industry, the report provides a wealth of intelligence for assessment and strategic decision-making.
Although based on similar thin film technologies, the manufacturing of semiconductors and MST/MEMS have, in reality, drifted apart. Guided by customer demand and neglected by the IC industry, the MST/MEMS industry started to develop its own processes and equipment. Entrepreneurs have built a solid position on this market with specialised products. In general the smaller companies tend to be, initially, more active when compared to the larger ones and MST/MEMS Front-End processing has over the years become more widely available. This applies equally to the specialised equipment market, as it does for the more general process equipment scenario. The processing functions of waferbonding, backside alignment and Deep Reactive Ion Etching of silicon are well established and there is ample choice of equipment and, generally, a good supply of services. Initially, semiconductor process equipment suppliers were hesitant to step into this market due to its relative restrictions and lack of standardisation, but alongside their natural customer base of IC manufacturers, these industries are gradually beginning to enter this new field. With this influx, a new emphasis on IC compatibility and standardisation is beginning to emerge.
The enablingMNT industry review on Front-End manufacturing equipment suppliers for MST/MEMS has been published in November 2003. It has more than 90 pages, which include 24 tables, 9 figures, and 45 company profiles.
Table of Contents
1 General Introduction
2 Contents, list of tables, list of figures, list of sponsors & advertisers
3 Executive Summary
4 Micro nano technologies (MNT)
4.1 Markets for MNT
4.2 Markets for MNT Equipment
4.3 Equipment Purchase process
5 Business Models and Strategies for MNT Front-End, Back-End and Metrology Equipment Suppliers
6 MST/MEMS Front-End Manufacturing Equipment
6.1 Silicon Wet Etching
6.2 Deep Reactive Ion Etching for Silicon
6.3 LPCVD low Stress Silicon Nitride
6.4 Front/Backside Alignment
6.5 Release Etching and Super Critical Cleaning
6.6 Waferbonding
6.7 Electro Deposition of Resist
7 Concluding Remarks
8 Company Profiles
9 List of Abbreviations
To order your copy of the enablingMNT Industry Review on Front-End Manufacturing Equipment Suppliers for MST/MEMS at €280, please download the order form.
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